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TITLE: Ion damage overrides structural disorder in silicon surface nanopatterning by low-energy ion beam sputtering
AUTHORS: Moreno-Barrado, A; Gago, R; Redondo-Cubero, A; Vázquez, L; Muñoz-García, J; Cuerno, R; Lorenz, K; Castro, M;
PUBLISHED: 2015, SOURCE: EPL - EPL (Europhysics Letters), VOLUME: 109, ISSUE: 4
INDEXED IN: CrossRef