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TITLE: Defect trapping and annealing for transition metal implants in group III nitrides
AUTHORS: Lorenz, K ; Vianden, R; Pearton, SJ; Abernathy, CR; Zavada, JM;
PUBLISHED: 2000, SOURCE: MRS INTERNET JOURNAL OF NITRIDE SEMICONDUCTOR RESEARCH, VOLUME: 5, ISSUE: 5
INDEXED IN: Scopus WOS CrossRef