A. Chuquitarqui
AuthID: R-00H-HGV
1
TITLE: Arrays of suspended silicon nanowires defined by ion beam implantation: mechanical coupling and combination with CMOS technology Full Text
AUTHORS: Llobet, J; Rius, G; Chuquitarqui, A; Borrise, X; Koops, R; van Veghel, M; Perez Murano, F;
PUBLISHED: 2018, SOURCE: NANOTECHNOLOGY, VOLUME: 29, ISSUE: 15
AUTHORS: Llobet, J; Rius, G; Chuquitarqui, A; Borrise, X; Koops, R; van Veghel, M; Perez Murano, F;
PUBLISHED: 2018, SOURCE: NANOTECHNOLOGY, VOLUME: 29, ISSUE: 15
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