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TITLE: Research of integral circuits by means of secondary ion emission
AUTHORS: Aristarkhova, AA; Volkov, SS; Kitaeva, TI; Klimkovich, BV; Ya Y Krasnitskij; Mal'chenkov, AP; Yu I Torgashin; Tolstoguzov, AB; Chumakov, EN;
PUBLISHED: 1993, SOURCE: Radiotekhnika i Elektronika, VOLUME: 38, ISSUE: 1
INDEXED IN: Scopus