Michaela Shiotani
AuthID: R-00K-E33
1
TITLE: Plasma-Assisted Nanofabrication: The Potential and Challenges in Atomic Layer Deposition and Etching
AUTHORS: Chiappim, William; Neto, Benedito Botan; Shiotani, Michaela; Karnopp, Julia; Goncalves, Luan; Chaves, Joao Pedro; Sobrinho, Argemiro da Silva; Leitao, Joaquim Pratas; Fraga, Mariana; Pessoa, Rodrigo;
PUBLISHED: 2022, SOURCE: NANOMATERIALS, VOLUME: 12, ISSUE: 19
AUTHORS: Chiappim, William; Neto, Benedito Botan; Shiotani, Michaela; Karnopp, Julia; Goncalves, Luan; Chaves, Joao Pedro; Sobrinho, Argemiro da Silva; Leitao, Joaquim Pratas; Fraga, Mariana; Pessoa, Rodrigo;
PUBLISHED: 2022, SOURCE: NANOMATERIALS, VOLUME: 12, ISSUE: 19
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