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TÍTULO: IMPROVE Simulation Tool Integrating heterogeneous simulation modules for semiconductor manufacturing processes  Full Text
AUTORES: Nuno Almeida; Joao Pires; David Sora;
PUBLICAÇÃO: 2012, FONTE: 23rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) in 2012 23RD ANNUAL SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE (ASMC)
INDEXADO EM: Scopus WOS CrossRef