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TITLE: The depth profile analysis of W-Si-N coatings after thermal annealing  Full Text
AUTHORS: Louro, C ; Cavaleiro, A ; Dub, S; Smid, P; Musil, J; Vlcek, J;
PUBLISHED: 2002, SOURCE: SURFACE & COATINGS TECHNOLOGY, VOLUME: 161, ISSUE: 2-3
INDEXED IN: Scopus WOS CrossRef: 11