W. Schwarzenbach
AuthID: R-00G-4KB
1
TITLE: Particle agglomeration study in rf silane plasmas: In situ study by polarization-sensitive laser light scattering Full Text
AUTHORS: Courteille, C; Hollenstein, C; Dorier, JL; Gay, P; Schwarzenbach, W; Howling, AA; Bertran, E; Viera, G; Martins, R ; Macarico, A;
PUBLISHED: 1996, SOURCE: JOURNAL OF APPLIED PHYSICS, VOLUME: 80, ISSUE: 4
AUTHORS: Courteille, C; Hollenstein, C; Dorier, JL; Gay, P; Schwarzenbach, W; Howling, AA; Bertran, E; Viera, G; Martins, R ; Macarico, A;
PUBLISHED: 1996, SOURCE: JOURNAL OF APPLIED PHYSICS, VOLUME: 80, ISSUE: 4
