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TÍTULO: A comparison between the use of EBIC and IBIC microscopy for semiconductor defect analysis  Full Text
AUTORES: Breese, MBH; Amaku, A; Wilshaw, PR;
PUBLICAÇÃO: 1998, FONTE: 13th International Conference on Ion Beam Analysis (IBA-13) in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, VOLUME: 136
INDEXADO EM: Scopus WOS CrossRef