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TITLE: Micromachined silicon accelerometer with fiber optic interrogation
AUTHORS: Uttamchandani Deepak, G; Dawei Liang ; Brian Culshaw;
PUBLISHED: 1993, SOURCE: Proceedings of the First Conference on Integrated Optics and Microstructure in Proceedings of SPIE - The International Society for Optical Engineering, VOLUME: 1793
INDEXED IN: Scopus