G. Braeckelmann
AuthID: R-00J-D3X
1
TITLE: Study of the 300-mm CoSi2 defects induced by Soft Sputter Etch process before cobalt deposition - Characterization, design of experiment and 200/300 mm comparison Full Text
AUTHORS: Humbert, A; Regnier, C; Braeckelmann, G; Basso, MT; Ferreira, P;
PUBLISHED: 2004, SOURCE: Materials Science and Engineering B: Solid-State Materials for Advanced Technology, VOLUME: 114-115, ISSUE: SPEC. ISS.
AUTHORS: Humbert, A; Regnier, C; Braeckelmann, G; Basso, MT; Ferreira, P;
PUBLISHED: 2004, SOURCE: Materials Science and Engineering B: Solid-State Materials for Advanced Technology, VOLUME: 114-115, ISSUE: SPEC. ISS.
