G. Braeckelmann
AuthID: R-00J-D3X
1
TÃTULO: Study of the 300-mm CoSi2 defects induced by Soft Sputter Etch process before cobalt deposition - Characterization, design of experiment and 200/300 mm comparison Full Text
AUTORES: Humbert, A; Regnier, C; Braeckelmann, G; Basso, MT; Ferreira, P;
PUBLICAÇÃO: 2004, FONTE: Materials Science and Engineering B: Solid-State Materials for Advanced Technology, VOLUME: 114-115, NÚMERO: SPEC. ISS.
AUTORES: Humbert, A; Regnier, C; Braeckelmann, G; Basso, MT; Ferreira, P;
PUBLICAÇÃO: 2004, FONTE: Materials Science and Engineering B: Solid-State Materials for Advanced Technology, VOLUME: 114-115, NÚMERO: SPEC. ISS.
