Lateral and Vertical Diffusion of Magnesium in Ion-Implanted Halide Vapor Phase Epitaxy Gallium Nitride

AuthID
 P-00Z-EQW
9
Author(s)
Sierakowski, K
·
Jaroszynski, P
·
Jakiela, R
·
Fijalkowski, M
·
Sochacki, T
·
Iwinska, M
·
Turek, M
·
Bockowski, M
Tipo de Documento
Article
Year published
2024
Publicado
in MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, ISSN: 1369-8001
Volume: 171, Páginas: 108022 (7)
Indexing
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Publication Identifiers
SCOPUS: 2-s2.0-85178660013
Wos: WOS:001128688300001
Source Identifiers
ISSN: 1369-8001
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