Publicações

AuthID
P-00Z-XFK

Author(s)

Pereira, RMP

Istrate, MC

Figueiras, FG

Silva, BM

Benamara, M

Romanyuk, KN

Ghica, C

Pereira, M

Silva, JPB

Tipo de Documento

Article in Press

Year published

2024

Publicado

in MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, ISSN: 1369-8001

Volume: 172, Páginas: 108102 (8)

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Publication Identifiers

DOI: 10.1016/j.mssp.2023.108102

SCOPUS: 2-s2.0-85183358442

Wos: WOS:001155878400001

Source Identifiers

ISSN: 1369-8001

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