Influence of Nitrogen Flow Rate on the Structure and Hardness of Ti-Si-N-O Thin Films Produced by Reactive Sputtering

AuthID
 P-011-95Y
8
Author(s)
García-Gonzalez L.
·
Garnica-Romo M.G.
·
Hernández-Torres J.
·
Martínez-Castillo J.
·
García-Ramírez P.J.
·
Ángel-Sauceda A.
·
Espinoza-Beltrán F.J.
Tipo de Documento
Proceedings Paper
Year published
2006
Publicado
in XXII Interamerican Congress of Chemical Engineering, CIIQ 2006 and V Argentinian Congress of Chemical Engineering, CAIQ 2006 - Innovation and Management for Sustainable Development
Páginas: 618
Indexing
Scopus®
Publication Identifiers
SCOPUS: 2-s2.0-84992371901
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