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Influence of Oxygen on the Iridium Silicide Formation by Rapid Thermal Annealing
AuthID
P-012-FD8
5
Author(s)
FERNANDEZ, M
·
RODRIGUEZ, T
·
ALMENDRA, A
·
JIMENEZLEUBE, J
·
WOLTERS, H
2
Editor(s)
Dawson,LR;Appelbaum,A
Document Type
Proceedings Paper
Year published
1994
Published
in
INFRARED DETECTORS - MATERIALS, PROCESSING, AND DEVICES,
ISSN: 0272-9172
Volume: 299, Pages: 325-328 (4)
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Wos
®
Scopus
®
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®
7
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Metadata
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Publication Identifiers
DOI
:
10.1557/proc-299-325
Scopus
: 2-s2.0-0028026433
Wos
: WOS:A1994BB24N00045
Source Identifiers
ISSN
: 0272-9172
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