Cvd And Characterization Of Al-Cu Metallization Thin-Films

AuthID
 P-014-YXD
6
Author(s)
HOULDING, VH
·
MAXWELL, H
·
CROCHIERE, SM
·
FARRINGTON, DL
·
TARTAGLIA, JM
4
Editor(es)
KATZ,A;MURARKA,SP;NISSIM,YI;HARPER,JME
Tipo de Documento
Proceedings Paper
Year published
1992
Publicado
in ADVANCED METALLIZATION AND PROCESSING FOR SEMICONDUCTOR DEVICES AND CIRCUITS - II, ISSN: 0272-9172
Volume: 260, Páginas: 119-124 (6)
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Wos®
Crossref®6
Google Scholar®
Publication Identifiers
Wos: WOS:A1992BX05U00013
Source Identifiers
ISSN: 0272-9172
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