Mass Spectrometry Improvement on an High Current Ion Implanter

AuthID
 P-016-KA7
5
Author(s)
Lopes, J. Gabriel
·
Alegria, F. C.
·
Rocha, J.
·
Alves, E.
Tipo de Documento
Article
Year published
2011
Publicado
in Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms, ISSN: 0168-583X
Volume: 269, Número: 24
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ISSN: 0168-583X
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