Effect of the Oxygen Flow on the Properties of Ito Thin Films Deposited by Ion Beam Assisted Deposition (Ibad)

AuthID
 P-003-YF8
4
Author(s)
Gao, JS
·
Song, SG
Tipo de Documento
Article
Year published
2008
Publicado
in THIN SOLID FILMS, ISSN: 0040-6090
Volume: 516, Número: 16, Páginas: 5454-5459 (6)
Conference
3Rd International Conference on Advances of Thin Films and Coatings, Date: DEC 11-15, 2006, Location: Singapore, SINGAPORE
Indexing
Wos®
Scopus®
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Publication Identifiers
SCOPUS: 2-s2.0-43949138563
Wos: WOS:000257452200062
Source Identifiers
ISSN: 0040-6090
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