Capacitively Coupled Radio-Frequency Hydrogen Discharges: The Role of Kinetics

AuthID
P-004-7H6
3
Author(s)
Tipo de Documento
Review
Year published
2007
Publicado
in JOURNAL OF APPLIED PHYSICS, ISSN: 0021-8979
Volume: 102, Número: 6, Páginas: 063305 (14)
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-34848854793
Wos: WOS:000249787200016
Source Identifiers
ISSN: 0021-8979
Export Publication Metadata
Info
At this moment we don't have any links to full text documens.