Breakdown in Planar Magnetron Discharges of Argon on Copper

AuthID
P-004-84X
Tipo de Documento
Article
Year published
2007
Publicado
in VACUUM, ISSN: 0042-207X
Volume: 81, Número: 11-12, Páginas: 1511-1514 (4)
Conference
6Th Iberian Vacuum Meeting/4Th European Topical Conference on Hard Coating, Date: JUN 26-28, 2006, Location: Salamanca, SPAIN, Patrocinadores: Spanish & Portuguese Vacuum Soc
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-34547881491
Wos: WOS:000249849800024
Source Identifiers
ISSN: 0042-207X
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