Reactive Sputtering of Tioxny Coatings by the Reactive Gas Pulsing Process: Part Iii: The Particular Case of Exponential Pulses

AuthID
 P-004-9A8
8
Author(s)
Lintymer, J
·
Gavoille, J
·
Sthal, F
·
·
Tipo de Documento
Article
Year published
2007
Publicado
in SURFACE & COATINGS TECHNOLOGY, ISSN: 0257-8972
Volume: 201, Número: 18, Páginas: 7733-7738 (6)
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Publication Identifiers
SCOPUS: 2-s2.0-34249063078
Wos: WOS:000248604800018
Source Identifiers
ISSN: 0257-8972
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