15Th International Conference on Ion Beam Modification of Materials, Date: SEP 18-22, 2006, Location: Taormina, ITALY, Patrocinadores: ST Microelect, IMM-CNR, MATIS CNR-INFM, Appl Mat, High Voltage Engn Europe, Axcelis, LPE-ETC, Hitec, Laser Source, 2M Strumenti, Varian, Univ Catania, Fac Sci