Absolute Photo-Absorption Cross Sections and Electronic State Spectroscopy of Selected Fluorinated Hydrocarbons Relevant to the Plasma Processing Industry

AuthID
 P-000-FF1
3
Author(s)
Eden, S
·
Mason, NJ
Tipo de Documento
Article
Year published
2003
Publicado
in RADIATION PHYSICS AND CHEMISTRY, ISSN: 0969-806X
Volume: 68, Número: 1-2, Páginas: 187-192 (6)
Conference
2Nd Conference on Elementary Processes in Atomic Systems, Date: SEP 02-06, 2002, Location: GDANSK, POLAND, Patrocinadores: European Phys Soc, Host: GDANSK UNIV TECHNOL
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Publication Identifiers
SCOPUS: 2-s2.0-17144451085
Wos: WOS:000184164100030
Source Identifiers
ISSN: 0969-806X
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