Sub-Micron Structuring of Silicon Using Femtosecond Laser Interferometry

AuthID
P-006-656
Tipo de Documento
Article
Year published
2013
Publicado
in OPTICS AND LASER TECHNOLOGY, ISSN: 0030-3992
Volume: 54, Páginas: 428-431 (4)
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-84880882551
Wos: WOS:000323992900064
Source Identifiers
ISSN: 0030-3992
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