Residual Stress States in Sputtered Ti1-Xsixny Films

AuthID
 P-000-S1A
7
Author(s)
·
Riviere, JP
·
Schaffer, E
·
Kleer, G
·
Bodmann, M
Tipo de Documento
Article
Year published
2002
Publicado
in THIN SOLID FILMS, ISSN: 0040-6090
Volume: 402, Número: 1-2, Páginas: 195-202 (8)
Indexing
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Publication Identifiers
SCOPUS: 2-s2.0-0036146472
Wos: WOS:000173378900025
Source Identifiers
ISSN: 0040-6090
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