Argon Temperature and Density Versus the Input Power in a High Pressure Planar Magnetron Discharge

AuthID
 P-000-S2P
5
Author(s)
Escrivao, ML
·
Pereira, PJS
·
Teixeira, MR
·
Maneira, MJP
Tipo de Documento
Article
Year published
2002
Publicado
in VACUUM, ISSN: 0042-207X
Volume: 64, Número: 3-4, Páginas: 367-371 (5)
Conference
4Th Iberian Vacuum Meeting (Ivm-4), Date: JUL 13-15, 2000, Location: SAMAMANCA, SPAIN, Patrocinadores: Spanish Vacuum Soc, Portuguese Vacuum Soc, Host: UNIV SALAMANCA, ESCUELA POLITECN SUPERIOR
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Publication Identifiers
SCOPUS: 2-s2.0-0036134723
Wos: WOS:000173202300029
Source Identifiers
ISSN: 0042-207X
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