Compensation of Temperature Effects on the Pull-In Voltage of Microstructures

AuthID
 P-008-PDV
3
Author(s)
Tipo de Documento
Article
Year published
2004
Publicado
in SENSORS AND ACTUATORS A-PHYSICAL, ISSN: 0924-4247
Volume: 115, Número: 2-3, Páginas: 351-356 (6)
Conference
17Th European Conference on Solid-State Transducers (Eurosensors Xvii), Date: SEP 21-24, 2003, Location: Guimaraes, PORTUGAL, Host: Univ Minho
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Publication Identifiers
SCOPUS: 2-s2.0-4544299705
Wos: WOS:000224141500025
Source Identifiers
ISSN: 0924-4247
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