Pb(Zr,Ti)O-3 Thin Films on Zirconium Membranes for Micromechanical Applications

AuthID
 P-008-RTK
7
Author(s)
Maeder, T
·
Muralt, P
·
Sagalowicz, L
·
Reaney, I
·
Kohli, M
·
Setter, N
Tipo de Documento
Article
Year published
1996
Publicado
in APPLIED PHYSICS LETTERS, ISSN: 0003-6951
Volume: 68, Número: 6, Páginas: 776-778 (3)
Indexing
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Scopus®
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Publication Identifiers
SCOPUS: 2-s2.0-36449006814
Wos: WOS:A1996TT66300017
Source Identifiers
ISSN: 0003-6951
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