Defect Recovery in Ain and Inn After Heavy Ion Implantation

AuthID
 P-008-ZZK
2
Author(s)
Vianden, R
2
Editor(es)
Hoffmann, A; Rizzi, A
Tipo de Documento
Proceedings Paper
Year published
2002
Publicado
in INTERNATIONAL WORKSHOP ON NITRIDE SEMICONDUCTORS, PROCEEDINGS, ISSN: 1610-1634
Volume: 0, Número: 1, Páginas: 413-416 (4)
Conference
International Workshop on Nitride Semiconductors (Iwn 2002), Date: JUL 22-25, 2002, Location: AACHEN, GERMANY, Patrocinadores: Res Ctr Julich, AIXTRON, Deutsch Forsch Gemeinsch, European Off Aerosp Res & Dev, Deutsch Gesell Kristallwachstum & Kristallzucht
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Publication Identifiers
SCOPUS: 2-s2.0-3342994468
Wos: WOS:000189455300089
Source Identifiers
ISSN: 1610-1634
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