Tunable Properties of Hydrogenated Amorphous/Nanocrystalline Silicon Thin-Films for Enhanced Mems Resonators Performance

AuthID
P-009-HFF
4
Author(s)
Mouro, J
·
Gualdino, A
·
Tipo de Documento
Article
Year published
2014
Publicado
in JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, ISSN: 1057-7157
Volume: 23, Número: 3, Páginas: 600-609 (10)
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-84901913679
Wos: WOS:000337128200016
Source Identifiers
ISSN: 1057-7157
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