Electrostatically Actuated Thin-Film Amorphous Silicon Microbridge Resonators

AuthID
P-000-3MN
3
Author(s)
Tipo de Documento
Article
Year published
2005
Publicado
in JOURNAL OF APPLIED PHYSICS, ISSN: 0021-8979
Volume: 97, Número: 9, Páginas: 094501 (11)
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-18844406032
Wos: WOS:000229155600088
Source Identifiers
ISSN: 0021-8979
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