Micromachining of an Air-Bridge Structure Using Thin-Films on Glass Substrates

AuthID
 P-001-4KF
4
Author(s)
Boucinha, M
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Tipo de Documento
Article
Year published
1999
Publicado
in SENSORS AND ACTUATORS A-PHYSICAL, ISSN: 0924-4247
Volume: 74, Número: 1-3, Páginas: 5-8 (4)
Conference
Symposium H - Materials Aspects in Microsystem Technologies, Date: JUN 16-19, 1998, Location: STRASBOURG, FRANCE
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Publication Identifiers
SCOPUS: 2-s2.0-0032674783
Wos: WOS:000079820200002
Source Identifiers
ISSN: 0924-4247
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