Influence of the Oxygen/Argon Ratio on the Properties of Sputtered Hafnium Oxide

AuthID
 P-000-3SY
4
Author(s)
Tipo de Documento
Article
Year published
2005
Publicado
in MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, ISSN: 0921-5107
Volume: 118, Número: 1-3, Páginas: 210-213 (4)
Conference
Symposium on Functional Oxides for Advanced Semiconductor Technologies, Date: MAY 24-28, 2004, Location: Strasbourg, FRANCE, Patrocinadores: Univ Degli Studi Catania, Natl Inst Sci & Technol Mat
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Publication Identifiers
SCOPUS: 2-s2.0-15344339242
Wos: WOS:000228514800045
Source Identifiers
ISSN: 0921-5107
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