Publicações

Characterization of Titanium Silicon Nitride Films Deposited by Pvd

AuthID
P-001-6BE

Author(s)

Vaz, F

Rebouta, L

da Silva, RMC

da Silva, MF

Soares, JC

Tipo de Documento

Article

Year published

1999

Publicado

in VACUUM, ISSN: 0042-207X

Volume: 52, Número: 1-2, Páginas: 209-214 (6)

Conference

2Nd European Conference on Hard Coatings (Etchc-2)/3Rd Iberian Vacuum Meeting (3Rd Riva), Date: SEP 22-24, 1997, Location: LISBON, PORTUGAL, Patrocinadores: Junta Nacl Investigacao Cient & Technol, Empresa Protuguese Aguas Livres, Spanish Vacuum Soc, Portuguese Vacuum Soc

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