Alpha-Elastic Recoil Detection Analysis of the Energy Distribution of Oxygen Ions Implanted into Silicon with Plasma Immersion Ion Implantation

AuthID
P-001-BEG
4
Author(s)
Mandl, S
·
Gunzel, R
Tipo de Documento
Article
Year published
1997
Publicado
in JOURNAL OF APPLIED PHYSICS, ISSN: 0021-8979
Volume: 81, Número: 10, Páginas: 6642-6650 (9)
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-0001402621
Wos: WOS:A1997WZ57500012
Source Identifiers
ISSN: 0021-8979
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