Backscattering/Channeling Study of High-Dose Rare-Earth Implants into Si

AuthID
P-00F-NVW
7
Author(s)
Vantomme, A
·
Wu, MF
·
Hogg, S
·
Pattyn, H
·
Langouche, G
·
Bender, H
Tipo de Documento
Article
Year published
1998
Publicado
in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, ISSN: 0168-583X
Volume: 136, Páginas: 471-477 (7)
Conference
13Th International Conference on Ion Beam Analysis (Iba-13), Date: JUL 27-AUG 01, 1997, Location: LISBON, PORTUGAL
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-0032017153
Wos: WOS:000074380400083
Source Identifiers
ISSN: 0168-583X
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