Silicon Oxycarbide Microcrystalline Layers Produced by Spatial Separation Techniques

AuthID
P-001-KJ4
5
Editor(es)
Schiff, EA; Hack, M; Madan, A; Powell, M; Matsuda, A
Tipo de Documento
Proceedings Paper
Year published
1994
Publicado
in AMORPHOUS SILICON TECHNOLOGY-1994 in Materials Research Society Symposium Proceedings, ISSN: 0272-9172
Volume: 336, Páginas: 55-60 (6)
Conference
Symposium on Amorphous Silicon Technology, at the 1994 Mrs Spring Meeting, Date: APR 04-08, 1994, Location: SAN FRANCISCO, CA, Patrocinadores: MAT RES SOC
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-84897585030
Wos: WOS:A1994BC30G00009
Source Identifiers
ISSN: 0272-9172
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