The Effect Of Substrate-Temperature On The Properties Of Sputtered Titanium-Oxide Films

AuthID
 P-001-N9H
3
Author(s)
Tipo de Documento
Article
Year published
1993
Publicado
in APPLIED SURFACE SCIENCE, ISSN: 0169-4332
Volume: 65-6, Número: C, Páginas: 235-239 (5)
Conference
6Th International Conf On Solid Films And Surfaces, Date: JUN 29-JUL 03, 1992, Location: PARIS, FRANCE, Patrocinadores: FRENCH MINIST RES & SPACE, CHAMBRE COMMERCE & IND PARIS, UNIV PIERRE & MARIE CURIE, CEA, CNRS, CTR NATL ETUDES TELECOMMUN, MARNE VALLEE VILLE NOUVELLE, THOMSON CSF, ST GOBAIN, APPLE
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Publication Identifiers
SCOPUS: 2-s2.0-0043021200
Wos: WOS:A1993KW45800040
Source Identifiers
ISSN: 0169-4332
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