The Effect Of Substrate-Temperature On The Properties Of Dc Reactive Magnetron Sputtered Titanium-Oxide Films

AuthID
P-001-NCF
3
Author(s)
Tipo de Documento
Article
Year published
1993
Publicado
in THIN SOLID FILMS, ISSN: 0040-6090
Volume: 223, Número: 2, Páginas: 242-247 (6)
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-0027541413
Wos: WOS:A1993KN64500007
Source Identifiers
ISSN: 0040-6090
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