Engineering Of Plasma Deposition Systems Used For Producing Large Area A-Si-H Devices

AuthID
 P-001-Q9T
4
Author(s)
CARVALHO, N
·
GUIMARAES, L
Tipo de Documento
Article
Year published
1991
Publicado
in JOURNAL OF NON-CRYSTALLINE SOLIDS, ISSN: 0022-3093
Volume: 137, Número: PART 2, Páginas: 757-760 (4)
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Publication Identifiers
SCOPUS: 2-s2.0-0040387195
Wos: WOS:A1991GX22800030
Source Identifiers
ISSN: 0022-3093
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