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Reactive Sputtering of Tioxny Coatings by the Reactive Gas Pulsing Process
AuthID
P-00H-E1J
8
Author(s)
Martin, N
·
Lintymer, J
·
Gavoille, J
·
Chappé, J
·
Sthal, F
·
Takadoum, J
·
Vaz, F
·
Rebouta, L
Document Type
Article
Year published
2007
Published
in
Surface and Coatings Technology,
ISSN: 0257-8972
Volume: 201, Issue: 18, Pages: 7727-7732
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DOI
:
10.1016/j.surfcoat.2007.03.021
Source Identifiers
ISSN
: 0257-8972
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