Reactive Sputtering of Tioxny Coatings by the Reactive Gas Pulsing Process

AuthID
 P-00H-E1J
8
Author(s)
Martin, N
·
Lintymer, J
·
Gavoille, J
·
Chappé, J
·
Sthal, F
·
Takadoum, J
·
Tipo de Documento
Article
Year published
2007
Publicado
in Surface and Coatings Technology, ISSN: 0257-8972
Volume: 201, Número: 18, Páginas: 7727-7732
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Source Identifiers
ISSN: 0257-8972
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