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Polymorphous Silicon Deposited in Large Area Reactor at 13 and 27 Mhz
AuthID
P-00H-FB0
6
Author(s)
Águas, H
·
Roca i Cabarrocas, P
·
Lebib, S
·
Silva, V
·
Fortunato, E
·
Martins, R
Document Type
Article
Year published
2003
Published
in
Thin Solid Films,
ISSN: 0040-6090
Volume: 427, Issue: 1-2, Pages: 6-10
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DOI
:
10.1016/s0040-6090(02)01172-0
Source Identifiers
ISSN
: 0040-6090
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