Fast and Cheap Method to Qualitatively Measure the Thickness and Uniformity of Zro2 Thin Films

AuthID
 P-00H-GHP
4
Author(s)
Marques, A
·
Tipo de Documento
Article
Year published
2001
Publicado
in Materials Science in Semiconductor Processing, ISSN: 1369-8001
Volume: 4, Número: 1-3, Páginas: 319-321
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ISSN: 1369-8001
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