Production of Nanohole/Nanodot Patterns on Si(001) by Ion Beam Sputtering with Simultaneous Metal Incorporation

AuthID
 P-00H-PHC
8
Author(s)
Gago, R
·
Caillard, R
·
Martin-Gago, JA
·
Palomares, FJ
·
Fernández, M
·
Vázquez, L
Tipo de Documento
Article
Year published
2009
Publicado
in Journal of Physics: Condensed Matter - J. Phys.: Condens. Matter, ISSN: 0953-8984
Volume: 21, Número: 22, Páginas: 224009
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ISSN: 0953-8984
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