Self-Organized Nanopatterning of Silicon Surfaces by Ion Beam Sputtering

AuthID
 P-00J-FND
7
Author(s)
Vázquez, L
·
Castro, M
·
Gago, R
·
Moreno-Barrado, A
·
Cuerno, R
Tipo de Documento
Article
Year published
2014
Publicado
in Materials Science and Engineering: R: Reports, ISSN: 0927-796X
Volume: 86, Páginas: 1-44
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ISSN: 0927-796X
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