Column Growth Mechanisms During Krf Laser Micromachining of Al2O3-Tic

AuthID
 P-000-692
3
Author(s)
Simoes, F
·
2
Editor(es)
Maher, MA; Stewart, HD
Tipo de Documento
Proceedings Paper
Year published
2005
Publicado
in MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY X in Proceedings of SPIE, ISSN: 0277-786X
Volume: 5715, Páginas: 101-109 (9)
Conference
Conference on Micromachining and Microfabrication Process Technology X, Date: JAN 25-27, 2005, Location: San Jose, CA, Patrocinadores: SPIE
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Publication Identifiers
SCOPUS: 2-s2.0-22044452376
Wos: WOS:000228834900011
Source Identifiers
ISSN: 0277-786X
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