Pressure Effects on the Dynamic Properties of Hydrogenated Amorphous Silicon Disk Resonators

AuthID
P-002-7JN
3
Author(s)
Gualdino, A
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Tipo de Documento
Article
Year published
2012
Publicado
in JOURNAL OF MICROMECHANICS AND MICROENGINEERING, ISSN: 0960-1317
Volume: 22, Número: 8, Páginas: 085026 (9)
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-84866332697
Wos: WOS:000306649000026
Source Identifiers
ISSN: 0960-1317
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