Structure and Chemical Bonds in Reactively Sputtered Black Ti-C-N-O Thin Films

AuthID
P-002-KDF
10
Author(s)
Chappe, JM
·
de Lucas, MCM
·
Pierson, JF
·
Imhoff, L
·
Heintz, O
·
Potin, V
·
Bourgeois, S
·
Tipo de Documento
Article
Year published
2011
Publicado
in THIN SOLID FILMS, ISSN: 0040-6090
Volume: 520, Número: 1, Páginas: 144-151 (8)
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-80054021018
Wos: WOS:000297441200024
Source Identifiers
ISSN: 0040-6090
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