Cmos-Integrated Aluminum Nitride Mems: A Review

AuthID
 P-00W-QJR
5
Author(s)
Gund, V
·
Dias, RA
·
Nagaraja, KK
·
Vinayakumar, KB
Tipo de Documento
Review
Year published
2022
Publicado
in JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, ISSN: 1057-7157
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Wos®
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Publication Identifiers
Wos: WOS:000799584900001
Source Identifiers
ISSN: 1057-7157
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