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TÍTULO: Epitaxial regrowth of C- and N-implanted silicon and alpha-quartz  Full Text
AUTORES: Harbsmeier, F; Bolse, W; da Silva, MR ; da Silva, MF; Soares, JC ;
PUBLICAÇÃO: 1998, FONTE: 13th International Conference on Ion Beam Analysis (IBA-13) in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, VOLUME: 136
INDEXADO EM: Scopus WOS CrossRef